院士簡歷
Current Positions
- Distinguished Research Chair Professor, National Tsing Hua U.
- Director, NTHU-TSMC Joint Research Center
- Dean, NTHU College of Semiconductor Research
- B.S. in Electrical engineering, National Taiwan University (1963)
- Ph.D. in Electrical Engineering, Ohio State University (1970)
- Research staff member and various managerial positions in IBM T.J. Watson Research Center and General Technology Division, USA (1970-92)
- President, Linnovation, Inc. Tampa, Florida (1992-present)
- Senior director, distinguished fellow/vice president, TSMC, Ltd. Hsinchu, Taiwan, R.O.C. (2000-2015)
- Distinguished Research Chair Professor at National Tsing Hua University (2016–present)
- Director, NTHU/TSMC Joint Research Center(2018-present)
- Dean, NTHU College of Semiconductor Research (2021-present)
- Founding editor in chief, Journal of Micro/nanolithography, MEMS, and MOEMS (2002-11)
- Nanolithography, Fourier Optics, Semiconductor Manufacturing Technology
- 10 IBM Invention Awards (1975, 76, 78, 82, 84, 86, 89, 92, 94, 97)
- IBM Outstanding Technical Contribution Award (1988)
- IEEE Fellow (2003)
- SPIE Fellow (2003)
- 1st recipient of SPIE Frits Zernike award. This is the highest SPIE award for lithographers. Burn is the first of the 12 following recipients (2004)
- Outstanding Research Award from PWY Foundation (2004)
- TSMC Innovation and Customer Partnership Award. This is a chairman level award. The highest recognition in TSMC at that time (2004, 2006)
- Most Valuable Player in VLSI Research Inc.’s All-Stars of the Chip Making Industry (2005)
- Member of US National Academy of Engineering (2008)
- Benjamin G. Lamme Meritorious Achievement Medal, Ohio State University (2009)
- IEEE Cledo Brunetti Award for contributions to immersion lithography for the manufacture of integrated circuit devices. Well recognized award for outstanding lithographers and other patterning related champions (2009)
- IEEE Jun-Ichi Nishizawa Medal for contributions to lithographic manufacturing, including immersion lithography. Medals are the highest level of awards in IEEE (2013)
- Distinguished Alumnus Award of the Academic Category from National Taiwan University (2018)
- Distinguished Alumnus Award from Ohio State University (2018)
- Future Science Prize on Mathematics and Computer Science (2018)
- The 15th Pan Wen Yuan Award (2021)
- SPIE Mozi Award recognizes outstanding discoveries, inventions, or scientific and technical achievements in the field of optics (2023)