美國俄亥俄州立大學最高成就金牌Benjamin G. Lamme Meritorious Achievement Medal (2009)
國際電機電子工程學會IEEE Cledo Brunetti Award for contributions to immersion lithography for the manufacture of integrated circuit devices. IEEE頒給微影家的高知名度獎(2009)
國際電機電子工程學會西澤潤一金牌 IEEE Jun-Ichi Nishizawa Medal for contributions to lithographic manufacturing, including immersion lithography. 金牌是IEEE奬項中最高的等級(2013)